Sc26 英

SC26 Magnetic Field Cancelling System

Wafer transport robots in 300mm wafer fabs. make 9 kHz fields that limit the performance of electron beam tools and are a barrier to achieving the next semiconductor CD node. The SC26 is a wide bandwidth system that can cancel magnetic fields from DC to above 9 kHz. To achieve its wide bandwidth, the SC26 uses low inductance field cancelling cables, installed in the electron beam tool enclosure.