Wafer transport robots in 300mm wafer fabs. make 9 kHz fields that limit the performance of electron beam tools and are a barrier to achieving the next semiconductor CD node. The SC26 is a wide bandwidth system that can cancel magnetic fields from DC to above 9 kHz. To achieve its wide bandwidth, the SC26 uses low inductance field cancelling cables, installed in the electron beam tool enclosure.
Electron microscopes have to operate in an ambient magnetic field comprising the earth’s field and fields radiated by electric power networks and electrical machines. When the ambient field changes, the electron beam in the microscope is deflected, causing loss of resolution and image distortion. The SC24 system stabilises the field by dynamically creating nearly equal and opposite field changes, so that the microscope performance is much improved.
Today’s high performance electron beam tools are very sensitive to changing ambient magnetic fields. The fields move the beam causing loss of resolution and measurement accuracy. The SC22 system reduces the ambient AC field and restores the resolution and accuracy.
