●Long term monitoring of the room environment for electron beam instruments, including Scanning Electron Microscopes (SEM), Transmission Electron Microscopes (TEM) , Electron Beam Lithography tools and SEM-based metrology and inspection tools
●Continuously measures Magnetic fields, Floor vibration in 3 axes, Acoustic levels at 2kHz, and Temperature/Humidity at 1Hz
●Inputs for 1 x 3-axis magnetic field sensor, 3 x Wilcoxon 731A accelerometers, Brüel & Kjær precision microphone, Temperature/Humidity sensor, and one BNC AUX
●Up to 14 different graphs may be displayed giving simultaneous display of the data as it is acquired
●Acquires sensor data and logs spectra and charts to date-stamped files
●Headless – Can run without user interface open
●Compares environment to specifications with PASS/FAIL indication. Sends signal to a traffic light or sends email if offline or out-of-spec

Report